SynopsisThe glow discharge is risen between chamber and target in the mixed gas of hydrogen and ammonia. In this discharge the mixed gas changes to plasma, the reactive NH radical occurs and it leads to nitriding. Precise nitriding can be achieved on any materials according to purpose, because the reactive radical can be generated more efficiently than other nitriding technique.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.