Nanocomposite films were fabricated by supersonic cluster beam deposition (SCBD) of palladium clusters on Poly(methyl methacrylate) (PMMA) surfaces. The evolution of the electrical conductance with cluster coverage and microscopy analysis show that Pd clusters are implanted in the polymer and form a continuous layer extending for several tens of nanometers beneath the polymer surface. This allows the deposition, using stencil masks, of clusterassembled Pd microstructures on PMMA showing a remarkably high adhesion compared to metallic films obtained by thermal evaporation. These results suggest that SCBD is a promising tool for the fabrication of metallic microstructures on flexible polymeric substrates.
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