In this work, the simple and low cost fabrication of a new sensitive gas sensor ZnSnO 3 thin film is demonstrated by mixing doped oxide solutions based on tin doped zinc oxide (ZnO:Sn) and fluorine doped tin oxide (SnO 2 : F). The structural, morphological, and optical properties are characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and spectrophotometry, respectively. Structural and morphological analysis confirmed the deposition of ZnSnO 3 film with porous surface using mixed doped oxide solutions. Optical studies reveal that ZnSnO 3 film exhibits a high transmittance (85%) and a wide band gap energy (3.5 eV), larger than that of ZnO:Sn film. Moreover, the several benefits of ZnSnO 3 film are confirmed by offering high sensitivity to NO 2 at room temperature.
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