S IMULATOR Plasma Source for Planar Electrodes, SPSPE, was designed to verify the experimental results of planar anode and cathode which were obtained previously using nitrogen gas. Experimentally, the glow discharge was carried out at operating pressure values in the range of 0.1 -0.6 Torr and the distance between the disc anode -disc cathode distance equal to 10 cm using nitrogen gas. The comparison between SPSPE and the experimental values at different product of pressure and distance values for breakdown voltage, discharge current and the second Townsend coefficient using nitrogen gas was made. It was found a good match between SPSPE and the experimental values. Also, the first Townsend coefficient was calculated by SPSPE at different product of pressure and distance values using nitrogen gas, while breakdown voltage and discharge current were calculated by SPSPE at different product of pressure and distance values using nitrogen, argon and carbon dioxide gases. It was found that the minimum breakdown voltage values equal to 472.77, 232.26 and 349.27 volts at minimum product of pressure and distance values equal to 1.5, 1 and 0.75 Torr.cm using nitrogen, argon and carbon dioxide gases, respectively. Also, it was found that the minimum discharge current values equal to 0.5228 mA and 3.65 mA at minimum product of pressure and distance value equal to 1 Torr. cmusing nitrogen and argon gases, respectively. While minimum discharge current value equal to 7.8 mA was obtained at minimum product of pressure and distance value equal to 0.75 Torr.cm using carbon dioxide gas.
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