Abstract:This study shows the effect of etching condition on microchannel of 100 µm width. Microchannels were fabricated on Monel 400 substrate by using different concentration of Ferric chloride (FeCl 3 ) and nitric acid (HNO 3 ) in water. Effect of exposure time on channel width and peel off resistance of photoresist is also studied. It is found that etching temperature has significant effect on undercut and depth of etch.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.