Binary blends and pseudo complexes of cellulose acetate (CA) with vinyl polymers containing N-vinyl pyrrolidone (VP) units, poly(N-vinyl pyrrolidone) (PVP) and poly(N-vinyl pyrrolidone-co-vinyl acetate) [P(VP-co-VAc)], were prepared, respectively, by casting from mixed polymer solutions in N,N-dimethylformamide as good solvent and by spontaneous co-precipitation from solutions in tetrahydrofuran as comparatively poor solvent. The scale of miscibility and intermolecular interaction were examined for the blends and complexes by solid-state 13 C-NMR spectroscopy. It was revealed that the formation of complexes was due to a higher frequency of hydrogen-bonding interactions between the residual hydroxyl groups of CA and the carbonyl groups of VP residues in the vinyl polymer component. From measurements of CP/MAS spectra and proton spin-lattice relaxation times (T 1q H ) in the NMR study, the existence of the hydrogen-bonding interaction was also confirmed for the miscible blends and the homogeneity of the mixing was estimated to be substantially on a scale within a few nanometers.

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We prepared three different kinds of polymers. The first was the STAR polymers having various length of the arms connected to the single core which could be decomposed by the acid. The second was the Linear polymers based on p-hydroxystylene (HS) which was also used for the arms of the STAR polymer. The other was the non-decomposable STAR polymer which had a quite similar shape to the STAR polymer and of which core structure could not be decomposed.Using those materials, lithographic performance obtained using a Micro Exposure Tool (MET) was compared with thermal property, and it was found that STAR-9mer-H having the 9 HS unit arms provided best overall performance, 24 nm of ultimate resolution, 4.3 nm of line width roughness and 4.6x10 -8 mJ･nm 3 of Z factor on MET evaluation. In addition to this, the specific resist based on the STAR polymer could achieve 26 nm resolution with quite wider process window capability that the control resist consisting of partially protected poly(p-hydroxystyrene) on the Alpha Demo Tool evaluation with conventional illumination.