We have developed a cryo scanning transmission X-ray microscope which uses soft X-rays from the National Synchrotron Light Source. The system is capable of imaging frozen hydrated specimens with a thickness of up to 10 microm at temperatures of around 100 K. We show images and spectra from frozen hydrated eukaryotic cells, and a demonstration that biological specimens do not suffer mass loss or morphological changes at radiation doses up to about 1010 Gray. This makes possible studies where multiple images of the same specimen area are needed, such as tomography (Wang et al. (2000) Soft X-ray microscopy with a cryo scanning transmission X-ray microscope: II. Tomography. J. Microsc. 197, 80-93) or spectroscopic analysis.
X-ray multilevel zone plate fabrication by means of electron-beam lithography: Toward high-efficiency performances J.We report here the optimization of processes for producing sub-20 nm soft x-ray zone plates, using a general purpose electron beam lithography system and commercial resist technologies. We have critically evaluated the failure point of the various process steps and where possible chosen alternate methods, materials, or otherwise modified the process. Advances have been made in most steps of the process, including the imaging resist, pattern conversion for electron beam exposure, and pattern transfer. Two phase shifting absorber materials, germanium and nickel, were compared. Zone plates with 30 nm outer zones have been fabricated in both germanium and nickel with excellent quality using polymethyl methyl accrylate and zones as small as 20 nm have been fabricated in nickel using the calixarene resist. The total efficiency as well as the efficiency of different regions of the zone plates were measured. All zone plates have demonstrated good efficiencies, with nickel zone plates performing better than germanium zone plates.
Single-crystal optical waveguides of 4-dimethylamino-N-methyl-4-stilbazolium tosylate (DAST), an organic material with a large electro-optic coefficient, have been obtained. DAST decomposes at its melting temperature, making its growth from the melt difficult. However, graphoepitaxy allows for >1 mm s−1 growth, 1×105 times faster than conventional techniques, and produces crystals of the correct dimensions for optical waveguides, 1–15 μm on a side and 5–10 mm long. The crystals grow with the c-axis normal to the substrate, and with in-plane orientation determined by lithographic patterning. The electro-optic coefficient dn/dE is 600±300 pm V−1 at 1.55 μm wavelength. Optical losses are <10 dB cm−1.
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