A bandpass FSS design is presented for duallayer energy saving glass panels, with the aim to improve RF communication in modern buildings. The proposed FSS design provides satisfactory transmission from 0.5 to 2 GHz. This design has several advantages over recently proposed dual-band FSSs: (a) its transmission bandwidth is significantly wider; (b) it does not block important communication signals such as GSM around 1800 MHz; and (c) it secures 2.45 GHz WLAN signals by confining them to the interior of the building.
Presented here a Frequency Selective Surface FSS that attenuates the cellular phone signals of 0.8, 0.9, 1.8 and 1.9 GHz bands, but transmits the Wi-Fi 2.45 GHz signals. It consists of two co-centric rings printed over a float-glass and can be used to isolate the intensive care rooms of hospitals from mobile phone calls, yet it supports Wi-Fi feature, enabling doctors to share the confidential medical reports to communicate with outside world.
Diffraction-based techniques have been shown to provide convenient, nondestructive, rapid metrology for lithography steps during semiconductor fabrication. Monitoring diffraction from latent images provides the capability to determine exposure tool focus to an absolute accuracy of 0.1 μm. Exposure dose and subsequently post-exposure bake have also been monitored using diffraction from latent images. Moiré alignment and overlay measurement techniques with nm-scale precision are demonstrated. Using 0.47-μm pitch gratings, a 1-nm translational sensitivity is demonstrated. A novel double-period moiré grating is used to provide both coarse (∼10 μm) and fine (∼1 μm) capture ranges for integration with existing stage positioning systems. A new diffraction-order interferometry technique for nm-precision remote overlay readout is demonstrated, with potential application to latent image structures immediately after exposure. We also present diffraction-based techniques to measure (critical dimensions) of ≥0.4-μm linewidth photoresist gratings. The results obtained are in excellent agreement with scanning electron microscope measurements.
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