This paper describes the micromachining program status of the micromachining laboratory at the SRRC. A preliminary LIGA process has been established. Many joint projects with local and foreign institutes to develop devices for domestic industries have been started. The interests in the application of the LIGA technology is continuously growing in Taiwan. Two-millimeter ultra-deep microstructures have been achieved.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.