First, in this paper, a new atmospheric-controlled induction heating and ne particle peening treatment system (vacuum AIH-FPP system) which reduces the oxygen concentration in the chamber to the order of ppm, much less than a conventional processing apparatus was presented. Next, in order to examine the effect on the formation of the surface modi ed layer of (i) mixing hard particles, (ii) the processing temperature, and (iii) the particle velocity, carbon steel AISI 1045 was treated with this system in conjunction with high-frequency induction heating, by peening Cr particles and mixed particles of Cr and high-speed tool steel. From the observation results by a scanning electron microscope and an energy dispersive X-ray spectrometer, it is clear that for the formation of a Cr diffused layer, using a mixture of Cr particles and high-speed tool steel particles is important. The treatment must be conducted at a higher temperature of approximately 1273 K to form a Cr diffused layer. Furthermore, by increasing the particle velocity, a thicker Cr transfer layer is formed at the surface under process. Therefore, an increased particle velocity accelerates the transfer of Cr.

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Herein, a method for predicting real-time removal rate and friction coefficient between the pad and substrate during chemical mechanical polishing was investigated using only the load currents of two motors of a polisher. Polishers for semiconductor devices are equipped with various sensors, enabling a real-time prediction of the removal amount. The polishers used to polish substrates are not usually equipped with sensors, and the polishing time is fine-tuned by skilled-technicians to achieve the desired substrate thickness. However, since every polisher has some motors, predicting the removal rate and friction coefficient using only the real-time data produced by these motors would be beneficial. This study attempts to predict the removal rate and friction coefficient in long-time polishing using a training dataset obtained from short-time polishing. Results showed that by performing extremely low-pressure, long-time polishing to understand the polisher characteristics and then subtracting the polisher characteristics from the motor information during long-time polishing, highly accurate predictions of the removal rate and friction coefficient within ~94% in percent match (prediction accuracy) between the experimental and predicted values can be obtained. Furthermore, slurry degradation during CMP can be monitored using this prediction method.

We developed a new surface treatment system, a vacuum atmospheric controlled induction heating fine particle peening (AIH FPP) treatment system. The system is able to shoot fine particles at high speed in a controlled atmosphere with less than 10 ppm of oxygen concentrations. In the treatment, the substrate is heated to higher temperature by high frequency induction heating. In order to investigate the effects of treatment temperature and shot of mixed particles of Chromium (Cr) and high speed steel (AISI M42) on the formation of the surface modified layer, carbon steel was treated by vacuum AIH FPP treatment using Cr particles and mixed shot particles of Cr and AISI M42 (Cr75, 50 and 25 mass) at 800°C and 1000°C in nitrogen atmosphere. The surface modified layer was characterized by a scanning electron micro scope (SEM) and an energy dispersive X ray spectrometer (EDX). In the case of the specimen treated with mixed shot particles of Cr and AISI M42 (Cr50 and 25 mass) at 1000°C, a Cr diffused layer was formed at the surface. This was because the diffusion of Cr was accelerated by higher temperature and using mixed shot particles of Cr and AISI M42. Moreover, we revealed that the increase in flow velocity at the point of FPP nozzle accelerated the transfer of Cr.