For the first time, a scalable, low power, deep-submicron TITSONOS (Thin-Film Transistor Silicon-Oxide-NitrideOxide-Silicon) memory cell is described with characteristics rivaling those of single crystal devices (>IO6 cycles, -1.6V window after 10 years on cycled cell at 85C) showing the promise of 3D integration and ultrasmall cell footprints. The ability to .vertically stack device layers enables the current memory density record of -200Mbyte/cm2, set by 90nm NAND, to be surpassed.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.