The flowing afterglow of a microwave discharge can be used to efficiently inactivate bacterial spores. We have conducted a parametric study of the operating conditions of such a system, which shows that the species participating in the killing of spores are oxygen atoms and ultraviolet (UV) photons. The oxygen atoms and the excited atoms and molecules emitting the photons being carried by the flowing afterglow can be made available throughout the sterilization chamber. Typical operating conditions are: gas mixture 2%O2/98%N2, pressure range 1–7 Torr and gas flow 0.5–3 slm. Total inactivation of 106 B. subtilis spores is achieved within 40 min with 100 W absorbed microwave power, at afterglow gas temperatures not exceeding 50 °C, a feature of interest for heat sensitive medical devices. The present scheme depends on the gas flow reaching all parts of the objects to be sterilized and on the short-lived active species being transported there sufficiently rapid. Under our operating conditions, it is the UV emission intensity that sets the sterilization time as there are always more than sufficient oxygen atoms available for the process.
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