A new external ion-beam system was developed and combined with a light ion-microbeam system in JAERI Takasaki. The system is designed for micro-particle-induced X-ray emission analysis of biological samples in air environment with 1 micron spatial resolution. One of the most serious problems in keeping such a high spatial resolution is multiple scattering in a beam exit window. Thin Kapton film (7.5 microns thick) was adopted as the exit window as well as a sample backing foil to minimize the distance between the film and samples. The lifetime of the foil under ion irradiation and spatial resolution of the external microbeam were investigated. The results shows that the film can endure sufficient long-time irradiation to take elemental maps and the resolution can be kept nearly 1 micron.
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