This paper describes the measurement results of piezoelectric harvesters with AlN as piezoelectric material. The output power harvested from mechanical vibrations has been measured on micromachined harvesters with different geometries. The resonance frequencies ranged from 200 up to 1200 Hz. A maximum output power of 60 µW has been measured at an acceleration of 2.0 g at a resonance frequency of 571 Hz; the power output is of the same level as obtained with devices based on PZT. The package of the harvester requires special attention, since air-damping can significantly decrease the maximum power output.

This paper describes the characterization of thin-film MEMS vibration energy harvesters based on aluminum nitride as piezoelectric material. A record output power of 85 μW is measured. The parasitic-damping and the energy-harvesting performances of unpackaged and packaged devices are investigated. Vacuum and atmospheric pressure levels are considered for the packaged devices. When dealing with packaged devices, it is found that vacuum packaging is essential for maximizing the output power. Therefore, a wafer-scale vacuum package process is developed. The energy harvesters are used to power a small prototype (1 cm 3 volume) of a wireless autonomous sensor system. The average power consumption of the whole system is less than 10 μW, and it is continuously provided by the vibration energy harvester.

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In this paper we report an airflow energy harvester that combines a piezoelectric energy harvester with a Helmholtz resonator. The resonator converts airflow energy to air oscillations which in turn are converted into electrical energy by a piezoelectric harvester. Two Helmholtz resonators with adjustable resonance frequencies have been designed-one with a solid bottom and one with membrane on the bottom. The resonance frequencies of the resonators were matched to the complementing piezoelectric harvesters during harvesting. The aim of the presented work is a feasibility study on using packaged piezoelectric energy harvesters with Helmholtz resonators for airflow energy harvesting. The maximum energy we were able to obtain was 42.2 μW at 20 m s −1 .

Tapering of the beams as a way to increase the generated output power of cantilever piezoelectric energy harvesters has gained popularity in recent years. The tapering increases the average strain in the beam and consequently the charge generated by the piezoelectric material. Different authors claim an improvement of up to 30% in the generated output power. We have investigated the possibility of using tapered beams in MEMS piezoelectric energy harvesters. Numerical simulations did not suggest any increase in the generated output power and the lack of improvement was confirmed in practice. With the help of the numerical simulations it was further found that the tapering does work but only for certain design configurations, namely for cantilevers with long slender beams. For cantilevers with short wide beams, the tapering has no significant effect on the output power of the harvester.