The characteristics of the spatial distribution of electron cyclotron resonance (ECR) plasma in an ECR-plasma enhanced metalorganic chemical vapour deposition system with a divergent magnetic field are investigated by a single Langmuir probe. The results show that the spatial distribution in the resonance room has a significant density gradient in both radial and axial directions. The ECR plasma density attains its highest value, about 3.0 × 10 11 cm −3 , at a position that moves away from the ECR point in the direction of the microwave window for about 2.5 cm. This peak is about ten times higher than the central plasma density in the downstream of the reactor chamber. Analysis of the spatial distribution in the reactor chamber shows that the ECR plasma in the upper region has poor radial and axial uniformity of plasma density and electron temperature under the influence of the magnetic field, whereas the plasma in the downstream region has fine radial uniformity. This excellent uniformity has extensive application in plasma processing. Furthermore, there is a maximum plasma density and a maximum electron temperature corresponding to a proper magnetic current. A change of magnetic current does not distort the characteristics of spatial distribution in the reactor chamber.
Grid-enhanced plasma source ion implantation (GEPSII) is a newly proposed technique for inner surface modification of materials with cylindrical geometry. In this paper, a collisional fluid model is used to investigate the ion sheath dynamics between the grid electrode and the inner surface of a cylindrical bore during the GEPSII process. Assuming the initial ion density along the radial direction is not uniform but determined by diffusion mechanisms, the effects of grid electrode radius, target radius and ion–neutral collisions on the ion dose and impact energy are investigated by solving fluid equations for ions coupled with Boltzmann assumption for electrons and Poisson's equation. The results show that small gap distance between grid electrode and target is favourable to increase the ion dose and impact energy on the target. In addition, ion–neutral collisions can reduce both the ion dose and impact energy.
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