In this work, we developed a phase field model describing surface evolution dynamics of a strained solid in contact with gas phase. Elastic solutions are solved with an iteration method for the system in which a solid film, strained by the mismatch strain between the film and substrate, has anisotropic elastic constants and the vapor phase has zero elastic constants. Elastic solutions are incorporated into the phase field evolution equation. The model predicts stable morphology at a given mismatch strain and perturbation wavelength.
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