Results of the design, microfabrication and testing of a proof-of-concept, diaphragm-type silicone sealing joint are presented. DRIE-etched cavities were filled with a flexible sealing element made of polydimethylsiloxane that supports a silicon piston. A series of sealing joints were produced with variable widths, and the displacement of the piston was measured after applying pressures of up to 1 bar above atmospheric pressure in 0.2 bar increments. Two masks were designed to produce several sets of silicone springs with widths of 2-10.5 lm, each consisting of a 10 lm thick silicon piston that is 2 mm long. Tests performed on the shear spring joints were found to give a displacement of 0.5 lm at 1 bar when the sealing width is 6 lm or more. The sealing joint with a 10 lm width was found to give a displacement of 0.9 lm and an elastic recovery of 88%. The results showed this type of joint in the form of an elastically-deforming seal provides sufficient displacement for propelling liquid droplets as part of a liquid propulsion system.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.