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This paper presents microfabrication methods and performance analysis of bonded powder permanent magnets targeting dimensions ranging from 10 µm to greater than 1 mm. For the structural definition and pattern transfer, a doctor blade technique is used to dry press magnetic powders into pre-etched cavities in a silicon substrate. The powders are secured in the cavities by one of the three methods: capping with a polyimide layer, thermal reflow of intermixed wax-binder particles, or conformal coating with a vapor-deposited parylene-C film. A systematic study of micromagnets fabricated using these methods is conducted using three different types of magnetic powders: 50 µm Nd–Fe–B, 5 µm Nd–Fe–B and 1 µm barium ferrite powder. The isotropic magnets are shown to exhibit intrinsic coercivities (Hci) as high as 720 kA m–1, remanences (Br) up to 0.5 T and maximum energy products (BHmax) up to 30 kJ m–3, depending on the magnetic powder used. Process compatibility experiments demonstrate the potential for the magnets to withstand typical microfabrication chemical exposure and thermal cycles, thereby facilitating their integration into more complex process flows. The remanences are also characterized at elevated temperatures to determine thermal sensitivities and maximum operating temperature ranges.

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This paper presents multifunctional self-assembly of millimeter scale components using magnetic forces between permanent micromagnets integrated on the component surfaces. Part-to-part assembly is demonstrated by batch assembly of free-floating 1mm x 1mm x 0.5mm silicon parts in a liquid environment with the assembly yield varying from 88% to 9000. Part-tosubstrate assembly is demonstrated by assembling an ordered array on a substrate in a dry environment with the assembly yield varying from 87% to 98%. In both cases, diverse magnetic shapes/patterns are used to control the alignment and angular orientation of the components and assembly times range from 15 -240 s.