Abstract. Thermal properties -specific heat and heat conductivity coefficient -of polycrystalline BaTiO 3 films on massive substrates were studied as a function of the temperature and the film thickness by ac-hot probe method. The anomalies of specific heat with decreasing of the film thickness from 1100 to 20 nm revealed the reducing of T c and excess entropy of the ferroelectric phase transition, which becomes diffused.The critical thickness of the film at which T c = 0 estimated as 2.5 nm.
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