Watt-class wavelength conversion is expected by enlarging the mode size of the channel waveguides to dozens of micrometers to avoid optical damage with high-power pump lasers. In this work, uniform periodically-poled (PP) structures in MgO doped stoichiometric LiTaO3 were fabricated by applying voltage with an SiO2 insulation layer. Annealed proton-exchanged waveguides with a full width at 1/e
2 maximum in a width of 43 μm and that in depth of 28 μm were obtained by proton exchanging for 4 h and thermal diffusion for 75 h. This waveguide can be excited by pump waves with a power of 8.6 W considering the optical damage threshold. Second harmonic generation with a wavelength of 515 nm was conducted in the low power region of about 35 mW to investigate the basic characteristics. Normalized wavelength conversion efficiency in the 15-mm-long PP structures was estimated to be 4.3%/W.
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