Proton exchanged channel waveguides in x-cut single-crystal lithium niobate thin film could avoid optical leakage loss which existed in the z-cut case. Indicated by simulations, the mechanism and condition of the optical leakage loss were studied. The light energy in the exchanged layer and the mode sizes were calculated to optimize the parameters for fabrication. By a very short time (3 minutes) proton exchange process without anneal, the channel waveguide with 2 μm width and 0.16 μm exchanged depth in the x-cut lithium niobate thin film had a propagation loss as low as 0.2 dB/cm at 1.55 μm. Furthermore, the Y-junctions based on the low-loss waveguide were designed and fabricated. For a Y-junction based on the 3 μm wide channel waveguide with 8000 μm bending radius, the total transmission could reach 85% ~90% and the splitting ratio maintained at a stable level around 1:1. The total length was smaller than 1 mm, much shorter than the conventional Ti-diffused and proton exchanged Y-junctions in bulk lithium niobate.
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