Surface polishing is an important technique in the precision/ultra-precision process, especially in the optical industry. This paper introduces a new polishing method named Flexible Polishing by Compound Diamond Powder (FPCDP), in which the polishing abrasive grains are made of a kind of compound particles with flexible base and abrasive diamond powder. In FPCDP process, the compound abrasive grains are jetted onto the workpiece surface with an accelerated speed at an incident angle, and the micro irregularities on the workpiece surface are removed during the scratching, rolling and ploughing by the compound abrasive grains. The mechanism of polishing process is analyzed and the machining condition is optimized by experiments, which shows that FPCDP is an efficient method to improve the glass surface roughness.
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