Here we present an investigation into the phase change mechanism and detection methods of the metal-insulator transition of vanadium dioxide (VO2). We are able to detect the onset of the phase transition, and track it to completion using both the mechanical and electrical response by depositing VO2/TiO2 layers onto microcantilever devices by pulsed laser deposition. The resonance frequency of v-shaped cantilevers was shown to increase by up to 41 % upon deposition of VO2 as detected by laser Doppler vibrometry. Such a large increase in resonance frequency is ascribed to high tensile stress imparted onto the cantilever during the deposition process. The insulator-metal transition manifested as a 5 % increase in the resonance frequency as a result of lattice compression, resulting in additional tensile stress in the more ordered metallic phase. Electrically, the transition was confirmed by over three orders magnitude decrease in resistance upon heating past the transition. The metal-insulator transition was measured with an accuracy of a few °C when comparing the two methods, however, the transition was much sharper in the mechanical response.
The bending resonance of micro-sized resonators has been utilized to study adsorption of analyte molecules in complex fluids of picogram quantity. Traditionally, the analysis to characterize the resonance frequency has focused solely on the mass change, whereas the effect of interfacial tension of the fluid has been largely neglected. By observing forced vibrations of a microfluidic cantilever filled with a series of alkanes using a laser Doppler vibrometer (LDV), we studied the effect of surface and interfacial tension on the resonance frequency. Here, we incorporated the Young–Laplace equation into the Euler–Bernoulli beam theory to consider extra stress that surface and interface tension exerts on the vibration of the cantilever. Based on the hypothesis that the near-surface region of a continuum is subject to the extra stress, thin surface and interface layers are introduced to our model. The thin layer is subject to an axial force exerted by the extra stress, which in turn affects the transverse vibration of the cantilever. We tested the analytical model by varying the interfacial tension between the silicon nitride microchannel cantilever and the filled alkanes, whose interfacial tension varies with chain length. Compared with the conventional Euler–Bernoulli model, our enhanced model provides a better agreement to the experimental results, shedding light on precision measurements using micro-sized cantilever resonators.
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