The aim of this study was to test the possibilities of using APCVD and CCVD to create effective antibacterial coatings and to determine their antibacterial activity. SiOx‐layers were created by use of a hexamethyldisiloxane (HMDSO) precursor in combination with silver nitrate solution and silver nanoparticles as additives. A strong antibacterial effect of the APCVD and CCVD coated samples on an Escherichia coli (E. coli) strain could be shown. Layers obtained by CCVD showed a longer‐lasting antibacterial activity. The results were verified using a commercially available microbial cell viability assay basing on the measurement of bacterial adenosine triphosphate (ATP) or by counting of colony forming units (CFU) on agar plates.
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