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Impedance measurements were conducted under practical load conditions in solid oxide fuel cells of differing sizes. For a 2 cm 2 button cell, impedance spectra data were separately measured for the anode, cathode, and total cell. Improved equivalent circuit models are proposed and applied to simulate each of measured impedance data. Circuit elements related to the chemical and physical processes have been added to the total-cell model to account for an extra relaxation process in the spectra not measured at either electrode. The processes to which elements are attributed have been deduced by varying cell temperature, load current, and hydrogen concentration. Spectra data were also obtained for a planar stack of five 61 cm 2 cells and the individual cells therein, which were fitted to a simplified equivalent circuit model of the total button cell. Similar to the button cell, the planar cells and stack exhibit a pronounced low-frequency relaxation process, which has been attributed to concentration losses, that is, the combined effects of diffusion and gas conversion. The simplified total-cell model approximates well the dynamic behavior of the SOFC cells and the whole stack.