We have developed a hybrid scanning probe microscopy sensor consisting of a SU-8 body and fill platinum cantilever and tip. The fabrication process is based on surfice-micromachining of a silicon wafer, where oxidation sharpened moulds deifne the tip shape, givig tips with a radiuis sharper than 20 nm. With optimized sptter deposition parameters we obtained filly straigbh platinum cantilevers after release. The release is based on a dry isotropic silicon under-etching. Platinum shows biocompatibility, maki the sensors suitable for imaging and force spectroscopy of living cells. A resonance frequency of 252 KHz and a mechanical qality factor of 56 are measured im air for a cantilever of 35 pm x 20 pm x 0.5 pm. A method fbr the immobilization of cells in cell-containers is dveloped to simplify their localization and Imaging.
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