High resolution KLL Auger electron spectra of H2S, SO2 and SF6 are presented and analyzed. The experimental equipment, using a recently designed electron retardation system, is described. For the analysis of the spectra, ab initio computations have been performed including configuration interaction. The discussion is mainly focussed on the satellite structure. The major satellites are due to shake-off in the valence shell accompanying the K-ionization and are found to be chemically dependent. Extra lines are also observed, which are assigned to autoionization processes.

An investigation of proximity effect correction at 10 keV using ghost and sizing indicates 0.4 μm design targets can be achieved on a raster scan lithography system. It is shown through simulation and experiment that the proximity effect can be effectively eliminated by use of ghost. Sizing provides an additional degree of freedom to control process latitude and wall angle.

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