Abstract-We demonstrate the design, fabrication, and characterization of a 4-bit tunable delay in an ultra-low-loss Si 3 N 4 planar platform. Temporal delays up to 12.35 ns with resolution of 0.85 ns are measured, for a total of 2.407 meters of propagation length. The TE waveguide propagation loss is measured to be (1.01 ± 0.06) dB/m at a wavelength of 1550 nm with the lowest loss of (0.57 ± 0.08) dB/m at 1591 nm.

We propose and analyze a novel highly integrated optical gyroscope using low loss silicon nitride waveguides. By integrating the active optical components on chip, we show the possibility of reaching a detection limit on the order of 19°/hr/√Hz in an area smaller than 10 cm(2). This study examines a number of parameters, including the dependence of sensitivity on sensor area.

We demonstrate sidewall gratings in an ultra-low-loss Si3N4 planar waveguide platform. Through proper geometrical design we can achieve coupling constant values between 13 and 310 cm(-1). The TE waveguide propagation loss over the range of 1540 to 1570 nm is below 5.5 dB/m.

The scaling of many photonic quantum information processing systems is ultimately limited by the flux of quantum light throughout an integrated photonic circuit. Source brightness and waveguide loss set basic limits on the on-chip photon flux. While substantial progress has been made, separately, towards ultra-low loss chip-scale photonic circuits and high brightness single-photon sources, integration of these technologies has remained elusive. Here, we report the integration of a quantum emitter single-photon source with a wafer-scale, ultra-low loss silicon nitride photonic circuit. We demonstrate triggered and pure single-photon emission into a Si3N4 photonic circuit with ≈ 1 dB/m propagation loss at a wavelength of ≈ 930 nm. We also observe resonance fluorescence in the strong drive regime, showing promise towards coherent control of quantum emitters. These results are a step forward towards scaled chip-integrated photonic quantum information systems in which storing, time-demultiplexing or buffering of deterministically generated single-photons is critical.

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Abstract:A tunable eye-opening lattice filter for dispersion compensation is demonstrated on an ultra low-loss waveguide platform based on a compact high-aspect ratio Si 3 N 4 core. A programmable 10th order lattice filter is demonstrated by cascading a total of 21 MachZehnder interferometers with programmable delay lines of lengths designed at the baseband data rate. The filter has a footprint of 2.23 cm 2 with continuously tunable dispersion from −500 ps/nm to 500 ps/nm. The filter shows a periodic transfer function with a measured FSR of 100 GHz capable of compensating multiple WDM channels with a single device. Blumenthal, and J. E. Bowers, "Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding," Opt.

We demonstrate the fabrication of a low loss broadband vertical coupler for use in the 3D integration of Si 3 N 4 based planar waveguides. Coupling loss of 0.2 dB was achieved and interaction between layers investigated.

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