Plasma polymers incorporating phosphate ions have been produced using triethyl phosphate as the precursor. Plasma phase analysis showed that the phosphate ion is highly stable in the plasma, while neutral species are more likely to be hydrocarbon precursor fragments. Increasing the RF power input increases the contribution of ions to the deposition. Surface analysis by XPS showed that the plasma polymer surfaces were a mixture of hydrocarbon species, retained PO groups, with only minor loss of PO groups. The stability of the plasma polymers in water on different substrates showed that applied RF power only had a minor effect on film solubility. The nature of the substrate − plasma species interaction is critical in being able to form insoluble structures.
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