Abstract-Mobile microrobots with characteristic dimensions on the order of 1cm are difficult to design using either MEMS (microelectromechanical systems) technology or precision machining. This is due to the challenges associated with constructing the high strength links and high-speed, low-loss joints with micron scale features required for such systems. Here we present an entirely new framework for creating microrobots which makes novel use of composite materials. This framework includes a new fabrication process termed Smart Composite Microstructures (SCM) for integrating rigid links and large angle flexure joints through a laser micromachining and lamination process. We also present solutions to actuation and integrated wiring issues at this scale using SCM. Along with simple design rules that are customized for this process, our new complete microrobotic framework is a cheaper, quicker, and altogether superior method for creating microrobots that we hope will become the paradigm for robots at this scale.

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Abstract-We introduce a curvature sensor composed of a thin, transparent elastomer film (polydimethylsiloxane, PDMS) embedded with a microchannel of conductive liquid (eutectic Gallium Indium, eGaIn) and a sensing element. Bending the sensor exerts pressure on the embedded microchannel via the sensing element. Deformation of the cross-section of the microchannel leads to a change in electrical resistance. We demonstrate the functionality of the sensor through testing on a finger joint. The film is wrapped around a finger with the sensing element positioned on top of the knuckle. Finger bending both stretches the elastomer and exerts pressure on the sensing element, leading to an enhanced change in the electrical resistance. Because the sensor is soft (elastic modulus E ∼ 1 MPa) and stretchable (>350%), it conforms to the host bending without interfering with the natural mechanics of motion. This sensor represents the first use of liquid-embedded elastomer electronics to monitor human or robotic motion.