A novel microelectromechanical piezoelectric concentrated-mass bulk acoustic wave (BAW) resonator based on out-of-plane degenerate mode is proposed for detecting micro angles. A PZT resonator with a concentrated-mass is designed to enhance the driving and sensing efficiency. The device combines the bulk acoustic wave drive/sense with a rocking concentrated mass to increase the resonant frequency, the signal quality and the resolution of the sensor. A 10 × 10 mm device has been fabricated and assembled by the microelectromechanical system process and the traditional mechanical process. The test results measured by the impedance analyser in air show that the resonant frequency and the quality factor of this device are about 174 kHz and 110, respectively. Moreover, the frequency split is only about 200Hz without any tuning methods.
Despite the popularity of piezoelectric vibratory micro-gyroscope in the past decades for their small size, low cost, batch fabrication and energy efficient, most of them can only detect single axis angular rate. In this paper, a novel biaxial piezoelectric micro-gyroscope fabricated with PZT wafer is proposed. To acquire two-axial angular rate sensing, a bouncing mode of the vibrator is utilized as the drive mode and two rocking modes are used as the sense modes. PZT is used as the vibration body instead of transducer, which enhances the drive and sense efficiency of the sensor. In this paper, the structure and working principle of the novel biaxial piezoelectric micro-gyroscope are introduced firstly. In addition, modal analysis has been made to research the voltage distribution of the piezoelectric vibrator and the drive and sense electrodes of the gyroscope are designed. By the optimization design of the proof mass, the frequency split between the drive mode (bouncing mode) and sense modes (rocking modes) is reduced and the sensitivity of the gyroscope is improved. Harmonic analysis has been made to research the Coriolis Effect of the gyroscope. The data get from the harmonic analysis is demodulated by Matlab and the sensitivity is given. The simulation results verify the principle of the novel biaxial piezoelectric micro-gyroscope. With the optimized design, the sensor is fabricated with MEMS technology at last.
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