MEMS‐based piezoelectric BAW resonator based on out‐of‐plane degenerate mode for micro angular detector

Cheng, Yuxiang; Zhang, W.P.; Guan, Ran; Zhang, G.; Xu, Zhong; Chen, W.Y.

doi:10.1049/el.2012.4293

Cited by 5 publications

(3 citation statements)

References 3 publications

(2 reference statements)

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“…In the past decades, considerable attention has been paid to micro-electromechanical system (MEMS) inertial devices, including gyroscopes and accelerometers owing to their small sizes, low cost, and high sensitivity [ 1 ]. After decades of technology development, MEMS gyroscopes with mid–low-end consumer grade and industrial grade precisions have been widely applied in automobiles, mobile phones, consumer electronics, and other fields [ 2 , 3 , 4 , 5 , 6 ].…”

Section: Introductionmentioning

confidence: 99%

Navigation Grade MEMS IMU for A Satellite

Zhao¹,

Cheng²,

Zhao³

et al. 2021

Micromachines

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This paper presents a navigation grade micro-electromechanical system (MEMS) inertial measurement unit (IMU) that was successfully applied for the first time in the Lobster-Eye X-ray Satellite in July 2020. A six-axis MEMS gyroscope redundant configuration is adopted in the unit to improve the performance through mutual calibration of a set of two-axis gyroscopes in the same direction. In the paper, a satisfactory precision of the gyroscope is achieved by customized and self-calibration gyroscopes whose parameters are adjusted at the expense of bandwidth and dynamics. According to the in-orbit measured data, the MEMS IMU provides an outstanding precision of better than 0.02 °/h (1σ) with excellent bias instability of 0.006 °/h and angle random walk (ARW) of around 0.003 °/h1/2. It is the highest precision MEMS IMU for commercial aerospace use ever publicly reported in the world to date.

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Section: Introductionmentioning

confidence: 99%

Navigation Grade MEMS IMU for A Satellite

Zhao¹,

Cheng²,

Zhao³

et al. 2021

Micromachines

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“…However, the PZT material itself has the characteristic of low quality factor, low output signal and much mechanical noise, compared with the silica-based material. As a result, how to increase the output signal and the sensitivity is a hot topic for piezoelectric gyroscopes (Cheng et al 2013). …”

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confidence: 99%

A MEMS piezoelectric solid disk gyroscope with improved sensitivity

et al. 2014

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surface. This design deployed a bulk piezoelectric structure as an entire resonator without any other elastic structures, to increase the shock resistance, the energy conversion efficiency and decrease the fabrication complexity. However, the PZT material itself has the characteristic of low quality factor, low output signal and much mechanical noise, compared with the silica-based material. As a result, how to increase the output signal and the sensitivity is a hot topic for piezoelectric gyroscopes (Cheng et al. 2013).On the other hand, the development of the MEMS silicon vibrating gyroscopes shows that the mode matching is a valid solution to increase the output signal and sensitivity of the gyroscopes (Tanaka et al. 1995). The mode matching is to match the resonant frequency between the drive mode and the sense mode, and to eliminate the frequency split. In most of the vibrating gyroscopes, the exact calculation and design should be made to implement a good characteristic. The ring vibrating gyroscope is a kind of degenerate gyroscope (He and Najafi 2002), which has an inherent axial symmetric resonator and utilizes a degenerate vibration mode pair as the drive and sense modes to maximize the energy transfer between the two modes. The degenerate gyroscopes have an inherent mode matching, which improves the characteristic and increases the sensitivity of the devices. In recent years, more and more attentions have been attracted by the degenerate gyroscopes, including the ring vibrating gyroscopes (He and Najafi 2002; Najafi 2000, 2001) and the hemispherical resonator gyroscopes (Zotov et al. 2012;Pai et al. 2012;Cho et al. 2013).This paper proposes a novel disk-like solid piezoelectric gyroscope based on the in-plane bulk acoustic wave (BAW) resonance. This design combines the solid piezoelectric gyroscopes with a disk-like resonant structure which is inherently mode matched. The structure not only obtains the high shock resistance and energy conversion efficiency Abstract This paper introduces a MEMS piezoelectric solid disk gyroscope. The gyroscope operates in an inplane elliptic bulk acoustic wave mode with a frequency of 284 kHz. This gyroscope is an improvement of the solid piezoelectric gyroscope. A device, 6 mm in diameter, has been fabricated through the microelectromechanical systems process, and achieved a relatively high sensitivity and bias instability. In this paper, it is described that the design, fabrication, circuit system and characteristics of the piezoelectric solid disk gyroscope.

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“…Introduction: Nowadays, micro-nanopositioning systems are applied to widespread applications of micro-nanotechnology and engineering [1][2][3]. To fulfil the tasks at the micro-nanoscale level, micronanopositioning systems are designed with high precision down to the nanometre range.…”

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confidence: 99%