The process of micro assembly requires high precision and accuracy for the positioning of micro parts. Therefore a demand exists for very precise and accurate handling devices with a specific focus on positioning devices. This paper presents an approach using robots based on closed kinematic chains, so called parallel robots, to achieve high precision in automated micro assembly. The discussion continues on a calibration process for parallel robot structures to increase the accuracy of the robot system. However obtaining an accuracy in the range of submicrometer requires an additional sensor controlled positioning process. Hence the paper presents an approach using visual control. That approach includes the application of area based matching techniques as well as photogrammetric calibration of the camera system to increase the accuracy within the image processing.
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