The structural, optical and electrical properties of spray pyrolysis deposited lanthanum aluminum oxide are reported. The films were deposited from a spraying solutions of lanthanum nitrate and aluminum acetylacetonate in N, N- dimethylformamide using an ultrasonic generator on (100) Si substrates. The substrate temperature was in the 550-650°C range. The thickness was in below 300 Aå. The optical band gap was 5.3 eV, and the refractive index at 630 nm was up to 1.62 depending of the relation lanthanum-aluminum. The electrical characteristics of the films were determined from the capacitance and current versus voltage measurements of metal-oxide-semiconductor (MOS) structures incorporating them. A dielectric constant in the 6-12 range, interface states density of the order of 1012 X 1/eV cm2 as well as breakdown fields higher than 3 MV/cm were determine in this way.
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