An electrostatic chuck (ESC) is a device used to clamp and transport flat-surfaced objects such as thin semiconductor wafers. Working by the principle of electrostatic force, its functionality is limited in handling objects with rough surfaces, as the attractive forces at work are significantly reduced. To improve this weak point, by employing 70 μm diameter polymer-based electrostatic inductive fibers with a conductive core, we develop a device prototype with an adhesional mechanism having a hairy microstructure with appropriate mechanical compliance. We theoretically and experimentally investigate how the prototype works, and how the fibers’ mechanical compliance affects the performance of ESC.
An electrostatic chuck (ESC) is a type of reversible dry adhesive which clamps objects by means of electrostatic force. Currently an ESC is used only for objects having flat surfaces because the attractive force is reduced for rough surfaces. An ESC that can handle objects with rough surfaces will expand its applications to MEMS (micro electro mechanical system) or optical parts handling. An ESC consisting of compliant electrostatic inductive fibers which conform to the profile of the surface has been proposed for such use. This paper aims at furthering previous research by observing the attractive force/pressure generated, both theoretically and experimentally, through step-by-step fabrication and analysis. Additionally, how the proposed fiber ESC behaves toward rough surfaces is also observed. The attractive force/pressure of the fiber ESC is theoretically investigated using a robust mechano-electrostatic model. Subsequently, a prototype of the fiber ESC consisting of ten fibers arranged at an angle is employed to experimentally observe its attractive force/pressure for objects with rough surfaces. The attractive force of the surface which is modeled as a sinusoidal wave with various amplitudes is observed, through which the feasibility of a fiber ESC is justified.
A compliant electrostatic gripper with bipolar voltage polarity for a pick-and-place manipulation is presented. The compliance, realized by the introduction of an array of micropillars which act as the electrode, extends the application of electrostatic-based gripper to manipulating fragile, rough-surfaced dielectric objects at macro scale. A prototype consisting of two arrays is developed by a chemical etching process. The experimental force is then compared with the theoretical force obtained from a simulation, showing a discrepancy between them. The sources of the discrepancy are analyzed to provide design insight for force improvement. To assess the reliability, the prototype is used for a manipulation demonstration of flat-surfaced paper. The result shows a good repeatability, and the necessary pick-up condition is confirmed. Subsequently, as the proof of the concept, another pick-up for rough-surfaced objects represented by a tissue paper with different roughness condition is also demonstrated. The effect of the rough surfaces to the generated forces is qualitatively discussed.
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