Galfenol Fe 83 Ga 17 films are sputtered on Si wafers without, and with Ti or Ti/Cu metallic seed layers in order to obtain a magnetoelastic layer which is sensitive to bending deformations of the compound structure. The layer thicknesses range from 100 nm to 5 μm. Layer morphology, texture, and the Villari effect are examined. The texture of the Galfenol films is strongly influenced by the seed layer. No low-index texture components are found for films directly deposited on Si and SiO 2 . On Ti, a (111) texture is formed on layers with more than 1000 nm thickness. A favorable (110) fiber texture is formed on Ti/Cu. Deforming the bimorphs (Si + layer system) by 0.012%, the Villari effect is detected due to the change in relative permeability. The maximum change occurs for Galfenol films with a thickness of 1 μm on a Ti/Cu buffer layer. The films open a route to the incorporation of magnetoelastic films into integrated magnetoelastic sensor devices.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.