This paper focuses on the technical differentiation of film bulk acoustic resonator (FBAR) technology from other mechanical resonator technologies for timing applications. The paper will touch on a recent modification of FBARs, the zero-drift resonator (ZDR), that is temperature compensated. One technology differentiator is the size of the chip-scale packaged resonator. Another is that the silicon lid is perfectly suitable for placement of integrated circuits and this is currently being done. Many factors (wide tuning range, high Q, high frequency, small size, integrated circuitry) are being used to differentiate potential products for the time and frequency markets.
When comparing different resonator technologies, it is essential that fundamental properties such as the unloaded Q be accurately portrayed. Important Figure-of-Merit (FOM) numbers for resonators include operating frequency, coupling coefficient (kt2), Q, and the products --kt2*Q and f*Q. Three of the five Figure's of Merit depend on an accurate evaluation of unloaded Q. Using a new equation for Q (derived from first principles), we can measure both Q and the coupling coefficient for a variety of resonator technologies and compare the relative performance metrics of each technology.
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