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Thin films prepared under conditions of low adatom mobility are characterized by a highly anisotropic physical structure with a wide range of systematically varying column and void sizes. The structure zone models, previously developed to classify the larger sized physical structures, are revised to account for the evolutionary growth stages of structure development as well as the separate effects of thermal- and bombardment-induced mobility. The zone T introduced by Thornton is shown to be a subzone within zone 1.

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Current issues and problems in the chemical vapor deposition (CVD) of diamond are those which relate to its characterization, its nucleation on foreign surfaces, the question of its formation in preference to the other phases of solid carbon (for example, graphite, chaoite, or lonsdaleite), why different morphologies and crystallographic orientations (textures) are seen in different experiments or with different parameters in the same experiment, and finally whether well-crystallized metastable phases can be obtained by CVD in other material systems or are only a peculiarity of carbon chemistry. Whether a given carbon coating is justly described as diamond has been such an issue, and coatings should clearly show evidence for diamond by x-ray diffraction and Raman spectroscopy before the claim of diamond is made. Experimental results have not been consistent in many cases, and much work remains to be done before an accurate assessment can be made of the technological impact of the development.

Sculptured thin films ͑STFs͒ are a new class of engineered columnar thin films in which their shapes can resemble oblique matchsticks, chevrons, multiple zigzags, S's, C's, helices, and even superhelices. They can have densities as low as 10%-30% of the bulk material and can be made of virtually any material. The origin and evolution of columnar thin films are reviewed in the context of structure zone models in which both thermally induced and ion bombardment-induced adatom mobility effects are considered. Since STFs are prepared under low adatom mobility and oblique angle of vapor incidence conditions, the columns are the result of clustering at the 1-10 nm level, with atomic self-shadowing controlling their growth evolution. The distribution functions of the cluster sizes, shapes, and relative heights are shown to be critical for any quantitative understanding of columnar growth, especially for achieving and maintaining steady state column diameters for oblique incidence where the self-shadowing is anisotropic in the plane of the film.