Single-port and two-port magnetostatic surface wave (MSSW) resonators have been demonstrated. These devices, based on etched groove array reflectors have shown high loaded Q’s (≳800) and clean resonance characteristics. A primary drawback lies in the fact that the reflective arrays must be accurately etched in the epitaxial YIG film, a complex and expensive process. This work reports the first use of etched metal reflector arrays to form resonant structures. A theoretical model is derived and applied to a two-port model of the device. Simpler to fabricate, the structure shows Q’s of ∼600.
An order of magnitude improvement in the specific contact resistance of gold-based ohmic contacts to p-type GaInAsP (Eg=1.13 eV) is reported. A novel technique using a silicon susceptor has been employed in a rapid thermal processor. A direct comparison between gold-based contacts annealed in a conventional furnace and the rapid thermal processor indicated a specific contact resistance of 4.2×10−5 and 4.1×10−6 Ω cm2, respectively. Auger electron spectroscopy, in depth profile mode, revealed two different metallurgical profiles for the conventional furnace and the rapid thermal processor. The rapid thermal processor was successfully implemented in a p-i-n optical detector process resulting in a reduction in the device series resistance and improved performance.
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