h devices have been fabricated using a CMOS-Ahsrrucr -Silicon micromachined ultrasonic compatihle process. Devices of up to Imm in size have been tested, with silicon nitride membranes of Ipm and 2pm thickness. The work has ultrasonic receivers, as a function of membrane investigated the response of these devices as thickness and lateral dimensions. I t is shown that the resultant surface micromachined transducers can operate over a wide bandwidth in air, without the resonant behaviour associated with previous devices.
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