In this work, the inductively‐coupled PECVD (ICPECVD) technology has been used to deposit moisture barrier coatings in the range of 25–1 200 nm on a 100 µm thick polyethylene terephthalate (PET) and polyethylene naphthalate (PEN) substrate. The water vapour transmission rate (WVTR) was determined at room temperature using the Calcium test method. A decrease in the metallic calcium layer thickness leads to an increase in transmission coefficient, related to the amount of absorbed water as a function of time. At a coating thickness of around 25 nm, the WVTR is reduced to less than 0.1 g · m−2 · d−1. With increasing SiN thickness, the transmission rate decreases to an excellent value of 2 × 10−3 g · m−2 · d−1.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.