Abstract-Uniplanar compact electromagnetic bandgap (UC-EBG) substrate has been proven to be an effective measure to reduce surface wave excitation in printed antenna geometries. This paper investigates the performance of a microstrip antenna phased array embedded in an UC-EBG substrate. The results show a reduction in mutual coupling between elements and provide a possible solution to the "blind spots" problem in phased array applications with printed elements. A novel and efficient UC-EBG array configuration is proposed. A probe fed patch antenna phased array of 7 5 elements on a high dielectric constant substrate was designed, built and tested. Simulation and measurement results show improvement in the active return loss and active pattern of the array center element. The tradeoffs used to obtain optimum performance are discussed.Index Terms-Electromagnetic bandgap (EBG), microstrip antenna phased array, mutual coupling, uniplanar compact electromagnetic bandgap (UC-EBG) geometry.
In extreme ultraviolet lithography (EUVL), the mask hangs on an electrostatic chuck and is moved laterally during exposition. For proper control of the chucked mask under corresponding inertial forces, static friction of the mask on the chuck is critical and an important input parameter for reliable theoretical modelling.To determine static and dynamic friction values, measurements were performed in vacuum on a mask blank with a test chuck, smaller than a real EUVL mask chuck, but otherwise nearly identical in its characteristics. Experimental results were obtained at various voltages for a materials combination of Low Thermal Expansion Glass (LTEM) for the pin chuck surface and a mask blank with a chromium metal backside metallisation, respectively. Dynamic friction was found to be only marginally smaller than static friction and values in the range from 0.27 to 0.33 were determined for the static friction coefficient under vacuum conditions.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.