Thin Films / Battery Electrodes / Microscopical Analysis / Glass Membranes / Ionic ConductivityThin film ion-conductive materials may represent essential components of future all-solidstate batteries. Besides, they are also of interest from a fundamental point of view. In this article, the deposition of thin films of complex oxides and amorphous glasses is discussed. Methods of local chemical analysis by analytical electron microscopy and atom probe tomography are described and studies of atomic transport in sputtered network glasses are presented. As experimental examples, thin films of Li borate and silicate glasses, LiCoO 2 , V 2 O 5 , and Li 4 Ti 5 O 12 are addressed.

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