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A technique is proposed for determining beam dimensions on a target by measuring two-dimensional angular distributions of the radiation for two distances between the crystal where the radiation is generated and a coordinate detector. The dimensions are determined from the results of a least squares method procedure with varying parameters, where the adjustable function is the distribution for a shorter distance and the fitting function is the convolution of the angular distribution at a greater distance with a twodimensional Gaussian distribution whose parameters are uniquely related to the beam dimensions on the target and the distances between the crystal and the detector. The minimum measured beam sizes are about 50-60 μm for the parametric x-ray mechanism and an electron energy of less than 1 GeV and 10-15 μm for the mechanism of diffracted transition radiation and electrons with an energy above several GeV.

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