Defect inspection using imaging-processing techniques, which detects and classifies manufacturing defects, plays a significant role in the quality control of microelectromechanical systems (MEMS) sensors in the semiconductor industry. However, high-precision classification and location are still challenging because the defect images that can be obtained are small and the scale of the different defects on the picture of the defect is different. Therefore, a simple, flexible, and efficient convolutional neural network (CNN) called accurate-detection CNN (ADCNN) to inspect MEMS pressure-sensor-chip packaging is proposed in this paper. The ADCNN is based on the faster region-based CNN, which improved the performance of the network by adding random-data augmentation and defect classifiers. Specifically, the ADCNN achieved a mean average precision of 92.39% and the defect classifier achieved a mean accuracy of 97.2%.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.