An optical accelerometer with a bulk-micromachined silicon proof mass and a microfiber loop resonator ͑MLR͒ sensor was developed. The MLR was fixed on the surface of the cantilever beam. The proof mass and cantilever beam were fabricated with a two-mask process. An accelerometer with a range of ±20 g and output sensitivity 624.7 mV/ g was fabricated. The design, simulation, fabrication, and preliminary results are presented.
A novel direct writing technique using submicron-diameter fibers is presented. This technique adopts contact mode in the process of writing, and submicron lines with different widths have been obtained. Experimental results demonstrate that the resolution of this technique can be smaller than the exposure wavelength of 442 nm, and 380-nm-wide line is achieved. In addition, the distribution of light fields in the photoresist layer is analyzed by finite-difference time-domain method.
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