Dielectric optical nanoantennas are promising as fundamental building blocks in next generation color displays, metasurface holograms, and wavefront shaping optical devices. Due to the high refractive index of the nanoantenna material, they support geometry-dependent Mie resonances in the visible spectrum. Although phase change materials, such as the germanium–antimony–tellurium alloys, and post-transition metal oxides, such as ITO, have been used to tune antennas in the near-infrared spectrum, reversibly tuning the response of dielectric antennas in the visible spectrum remains challenging. In this paper, we designed and experimentally demonstrated dielectric nanodisc arrays exhibiting reversible tunability of Mie resonances in the visible spectrum. We achieved tunability by exploiting phase transitions in Sb2S3 nanodiscs. Mie resonances within the nanodisc give rise to structural colors in the reflection mode. Crystallization and laser-induced amorphization of these Sb2S3 resonators allow the colors to be switched back and forth. These tunable Sb2S3 nanoantenna arrays could enable the next generation of high-resolution color displays, holographic displays, and miniature LiDAR systems.

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Growth and characterization of Hf-aluminate high-k gate dielectric ultrathin films with equivalent oxide thickness less than 10 Å

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