The resonance frequency and internal friction Q Ϫ1 of the first eigenmode of microfabricated silicon cantilevers are measured in the temperature range of 15-300 K. The analysis shows that variation of Young's modulus is responsible for the temperature dependence of the resonance frequency, whereas the dependence of the geometrical dimensions can be neglected. Accordingly, the data can be fitted by the Wachtman equation, yielding a Debye temperature ⌰ D ϭ634 K. The temperature variation of internal friction Q Ϫ1 is analyzed in terms of Zener's theory of thermoelastic damping. Due to the temperature dependence of the thermal expansion coefficient ␣, thermoelastic damping is expected to vanish at 20 K and 125 K. A minimum of internal friction is observed at 20 K, whereas the minimum at 125 K appears to be hidden by other dissipation effects. A maximum of internal friction at 160 K is observed, which is an activation peak due to phonon scattering by atomic-scale defects. The best force sensitivity is achieved at 20 K, where a factor of 10 is gained compared to room temperature.

Force microscopy experiments with the pendulum geometry are performed with attonewton sensitivity (Rugar et al 2004 Nature 43 329). Single-crystalline cantilevers with sub-millinewton spring constants were annealed under ultrahigh-vacuum conditions. It is found that annealing with temperatures below 500 °C can improve the quality factor by an order of magnitude. The high force sensitivity of these ultrasoft cantilevers is used to characterize small magnetic and superconductive particles, which are mounted on the end of the cantilever. Their magnetic properties are analysed in magnetic fields as a function of temperature. The transition of a superconducting sample mounted on a cantilever is measured by the detection of frequency shifts. An increase of dissipation is observed below the critical temperature. The magnetic moment of ferromagnetic particles is determined by real time frequency detection with a phase-locked loop (PLL) as a function of the magnetic field. The dissipation between the probing tip and the sample is another important ingredient for ultrasensitive force measurements. It is found that dissipation increases at separations of 30 nm. The origins of this type of dissipation are poorly understood. However, it is predicted theoretically that adsorbates can increase this dissipation channel (Volokitin and Persson 2005 Phys. Rev. Lett. 94 086104). First experiments are performed under ultrahigh vacuum to investigate this type of dissipation. Long-range dissipation is closely related to long-range forces. The distance dependence of the contact potential is found to be an important aspect.

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Surface enhanced solid-state NMR by dynamic nuclear polarization (DNP SENS) enables the characterization of the inner-pore surface functionalization of porous etched ion-track membranes exhibiting low specific surface areas compared to typical SBA- or MCM-type mesoporous silica materials. The membranes were conformally coated with a 5 nm thin SiO2 layer by atomic layer deposition. This layer was subsequently modified by aminopropyl silane linkers that allow further functionalization via the terminal amine group. The results evidence that in principle DNP SENS is a capable tool to analyze more complex porous systems, e.g. bioinspired functional etched ion-track membranes down to the molecular level. These results are relevant also for single nanopore systems, for which a direct analysis of the channel surface functionalization is not feasible by classical characterization methods. The applicability of DNP SENS to complex porous systems requires the optimization of the sample preparation and measurement parameters.

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