We present the development of millimeter scale 3D hemispherical shell resonators fabricated from the polycrystalline diamond, a material with low thermoelastic damping and very high stiffness. These hemispherical wineglass resonators with 1.1 mm diameter are fabricated through a combination of micro-electro discharge machining (EDM) and silicon micromachining techniques. Using piezoelectric and electrostatic excitation and optical vibration measurement, the elliptical wineglass vibration mode is determined to be at 18.321 kHz, with the two degenerate wineglass modes having a relative frequency mismatch of 0.03%. A study on the effect of the size and misalignment of the anchor and resonator's radius variation on both the average frequency and frequency mismatch of the 2θ elliptical vibration modes is carried out. It is shown that the absolute frequency of a wineglass resonator will increase with the anchor size. It is also demonstrated that the fourth harmonic of radius variation is linearly related to the frequency mismatch.
The hemispherical resonator gyro (HRG) is low loss and high stability, spurring recent interest in micro-scale hemispherical resonators. To achieve mode-matching and high-Q performance in a hemispherical resonator, geometric symmetry in combination with low thermoelastic damping structural material are critical. In this work, we describe the development of millimeter scale 3D hemispherical shell resonators fabricated from polycrystalline diamond, a material with low thermoelastic damping and very high stiffness. The relation between the fourth harmonic (4θ) in a Fourier analysis of the resonator's radius r(θ) and frequency mismatch (Δf) of the 2θ elliptical vibration modes of the shell resonator is demonstrated.
We present the development of millimeter scale 3D hemispherical shell resonators fabricated from polycrystalline diamond, a material with low thermoelastic damping and very high stiffness. Resonators are fabricated through a combination of electro discharge machining (EDM) and silicon micromachining techniques, to achieve 1 mm diameter 3D highly axisymmetric hemispherical shell structures. By using piezoelectric actuation and optical characterization, the elliptical wineglass vibration mode is determined to be at 34.86 kHz, with the two degenerate wineglass modes having a relative frequency mismatch of 2%.
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