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The current density is measured as a function of time for thin (⩽1000 Å) barium strontium titanate (BST) capacitors with platinum electrodes. The current density curve shows a peak prior to the onset of resistance degradation. The peak position on the time axis varies with applied voltage and temperature. The data are explained by the theory for space-charge-limited (SCL) current transients, and the measured current is identified as ionic current associated with oxygen vacancies. Using the SCL analysis, the mobility of the oxygen vacancies is measured as a function of temperature. The mobility obtained from current measurements is shown to be compatible with the Einstein relation for mobility and diffusivity. In summary, the ionic current associated with oxygen vacancies is shown to be an important component of the measured current in thin BST films.

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Structural and ferroelectric properties of the caxis oriented SrBi2Ta2O9 thin films deposited by the radio frequency magnetron sputtering

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